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ACE at Precision Fair 2022: focus on semi-conductor industry
The active insulation system ISOModA. (c) ACE

ACE at Precision Fair 2022: focus on semi-conductor industry

This year, damping specialist ACE Stoßdämpfer GmbH from Langenfeld, Germany, will once again be present at the Precision Fair on Nov. 16 and 17. The German company will be presenting products that eliminate vibrations in precision processes. These are particularly useful in the semi-conductor industry.  

Active and passive isolation of vibrations 

Measuring machines are a delicate business. The smallest inaccuracies lead to unusable results. Vibrations from the environment that can be transmitted to the system must therefore be isolated. When it comes to perfect vibration isolation of measuring tables, test rigs and high-power machines, ACE's low-frequency components are a good choice. 

Active insulation systems 

For extremely precise applications, ACE offers the ISOTAblA and ISOModA active insulation systems. ISOTAblA involves active table platforms; the ISOModA product line consists of modular active isolation elements. They are typically used in many high-tech industries, in laboratory, pharmaceutical and medical technology, and in high-precision measurement applications. With ISOTablA, active isolation from 0.5 Hz to 100 Hz is possible. 

ACE at Precision Fair 2022: focus on semi-conductor industry 1
A PAL air spring element. (c) ACE

Both systems are easy to install, are active in six degrees of freedom, and feature integrated real-time diagnostic tools. For nano and sub-nano applications, these active isolation systems are more suitable than air springs. The active systems also use a linear motor as the active actuator. This increases the stroke of the active actuator by about a factor of 3 compared to piezoelectric devices often used by competitors. 

PAL air spring elements 

For less extremely precise applications, ACE has the high-quality low-frequency PAL air spring elements in its range. These are made for conditions where the user wants both isolation from vibration and a constant level. PAL systems are level-controlled air springs and respond quickly to load and center of gravity changes. They automatically correct deviations from the preset position. Thereby, they are available in many different sizes for load capacities from 126 to 42,000 kg per air spring. 

Cleanroom cleaned 

ACE Stoßdämpfer supplies cleaned and packaged hydraulic shock absorbers through VDL cleanroom. ACE's RGA-tested TUBUS dampers are also widely used in the semiconductor industry.   

ACE Stoßdämpfer GmbH can be found at the Precision Fair in Hall 1 at booth 335. More information at: www.ace-ace.nl

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